Silicon-germanium spherical quantum dot infrared photodetectors prepared by the combination of bottom-up and top-down technologies
Journal
Journal of Vacuum Science & Technology B
Journal Volume
22
Journal Issue
1
Pages
109-115
Date Issued
2004
Author(s)
Other Subjects
Alumina; Electron energy levels; Evaporation; Ionization; Methanol; Molecular beam epitaxy; Reactive ion etching; Semiconducting germanium; Semiconducting silicon; Semiconductor quantum dots; Synthesis (chemical); Transmission electron microscopy; Quantum dot infrared photodetectors (QDIP); Thermal evaporation; Ultrasonic bath; Infrared detectors
Type
journal article