Lateral Non-uniformity Reduction by Compensatory Metal Embedded in MOS Structure with Ultra-Thin Anodic Oxide

Journal

Electrochemical Society Transactions - Dielectrics for Nanosystems 7: Materials Science, Processing, Reliability, and Manufactur

Journal Volume

72

Journal Issue

2

Pages

1956-1961

Date Issued

2016

Author(s)

J.Y.Chen

W.C.Kao

J.G.Hwu*

DOI

URI

Type

journal article