https://scholars.lib.ntu.edu.tw/handle/123456789/429894
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chien-Lin Lee | en_US |
dc.contributor.author | Sheng-Wei Chien | en_US |
dc.contributor.author | Kuen-Yu Tsai* | en_US |
dc.contributor.author | KUEN-YU TSAI | en_US |
dc.creator | KUEN-YU TSAI;Kuen-Yu Tsai*;Sheng-Wei Chien;Chien-Lin Lee | - |
dc.date.accessioned | 2019-10-31T07:58:04Z | - |
dc.date.available | 2019-10-31T07:58:04Z | - |
dc.date.issued | 2018 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/429894 | - |
dc.relation.ispartof | The 31th International Microprocesses and Nanotechnology Conference (MNC 2018) | - |
dc.title | Characterization of proximity effects in helium ion beam lithography by direct Monte Carlo simulation and resist calibration | en_US |
dc.type | conference paper | en |
item.fulltext | no fulltext | - |
item.openairetype | conference paper | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
crisitem.author.dept | Electrical Engineering | - |
crisitem.author.dept | Electronics Engineering | - |
crisitem.author.orcid | 0000-0002-2531-1716 | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
crisitem.author.parentorg | College of Electrical Engineering and Computer Science | - |
顯示於: | 電機工程學系 |
在 IR 系統中的文件,除了特別指名其著作權條款之外,均受到著作權保護,並且保留所有的權利。