Divergent dielectric characteristics in cascaded high-K gate stacks with reverse gradient bandgap structures

Journal

Journal of Physics D: Applied Physics

Journal Volume

49

Journal Issue

26

Date Issued

2016

Author(s)

Tsai M.-C.

Cheng P.-H.

Lee M.-H.

Lin H.-C.

DOI

10.1088/0022-3727/49/26/265108

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84978224321&doi=10.1088%2f0022-3727%2f49%2f26%2f265108&partnerID=40&md5=da5d0bacf84b5b7199d2b939c24c587a

https://scholars.lib.ntu.edu.tw/handle/123456789/432418

Publisher

Institute of Physics Publishing

Type

journal article