https://scholars.lib.ntu.edu.tw/handle/123456789/432471| Title: | Effects of nitrogen partial pressure on titanium oxynitride films deposited by reactive RF magnetron sputtering onto PET substrates | Authors: | Lin M.C. Chang L.-S. Lin H.C. HSIN-CHIH LIN |
Issue Date: | 2008 | Journal Volume: | 202 | Journal Issue: | 22-23 | Start page/Pages: | 5440-5443 | Source: | Surface and Coatings Technology | URI: | https://www.scopus.com/inward/record.uri?eid=2-s2.0-50349099253&doi=10.1016%2fj.surfcoat.2008.06.066&partnerID=40&md5=fceb6d0689dc11aafe56908e8ff4b7d9 https://scholars.lib.ntu.edu.tw/handle/123456789/432471 |
ISSN: | 02578972 | DOI: | 10.1016/j.surfcoat.2008.06.066 |
| Appears in Collections: | 材料科學與工程學系 |
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