Interface of sputter-deposited TiNi thin film on (100) Si wafer

Journal

Materials Science Forum

Journal Volume

327

Pages

127-130

Date Issued

2000

Author(s)

Wu S.K.

Wang J.Y.

Wu I.J.

Lin H.C.

DOI

10.4028/www.scientific.net/msf.327-328.127

URI

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0033888352&partnerID=40&md5=ab76ceb80f3bd69e271e1006d28a2c50

https://scholars.lib.ntu.edu.tw/handle/123456789/432524

Publisher

Trans Tech Publ, Uetikon-Zuerich, Switzerland

Type

journal article