Growth and characterization of nonpolar ZnO (1 0 over(1, -) 0) epitaxial film on γ-LiAlO2 substrate by chemical vapor deposition
Journal
Journal of Crystal Growth
Journal Volume
308
Journal Issue
2
Pages
412-416
Date Issued
2007
Author(s)
Abstract
A simple chemical vapor deposition approach to the growth of nonpolar ZnO with [1 0 over(1, -) 0] orientation on a γ-LiAlO2 substrate is presented. The dependence of growth characteristics on the growth temperature is investigated. Following the CVD growth, the surface morphologies of ZnO film were investigated by a scanning electron microscope. The characterizations of structure and orientation by a scanning transmission electron microscope indicate that the ZnO film is oriented in the nonpolar [1 0 over(1, -) 0] m-direction. Photoluminescence result of nonpolar ZnO shows a strong UV emission peak at around 375 nm at room temperature. © 2007 Elsevier B.V. All rights reserved.
Type
journal article