Characteristics of low-resistivity aluminum-doped zinc oxide films deposited at room temperature by off-axis radio-frequency sputtering on flexible plastic substrates
Journal
Applied Physics a-Materials Science & Processing
Journal Volume
122
Journal Issue
8
Pages
731
Date Issued
2016
Author(s)
Wang, Chih-Yi
Jheng, Ciao-Ren
Wu, Syu-Jhan
Sai, Chen-Kai
Lee, Ya-Ju
Chiang, Ching-Yu
Shew, Bor-Yuan
Type
journal article