Single-crystal hexagonal perovskite YAlO3 epitaxially on GaAs(111)A and (001) using atomic layer deposition
Journal
Microelectronic Engineering
Journal Volume
178
Pages
125-127
Date Issued
2017
Author(s)
Cheng, C.K.
Young, L.B.
Lin, K.Y.
Lin, Y.H.
Wan, H.W.
Lu, G.J.
Chang, M.T.
Cai, R.F.
Lo, S.C.
Li, M.Y.
Hsu, C.H.
Kwo, J.
Type
journal article