Single-Crystal Y 2 O 3 Epitaxially on GaAs(001) and (111) Using Atomic Layer Deposition

Journal

Materials

Journal Volume

8

Journal Issue

10

Pages

7084-7093

Date Issued

2015

Author(s)

Lin, Y.H.

Cheng, C.K.

Chen, K.H.

Fu, C.H.

Chang, T.W.

Hsu, C.H.

Kwo, J.

CHIA-KUEN CHENG

DOI

10.3390/ma8105364

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443325

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84946556044&doi=10.3390%2fma8105364&partnerID=40&md5=7a09fbe091602b2215c8f392ddd9f223

Type

journal article