High 庥/InGaAs for ultimate CMOS - Interfacial passivation, low ohmic contacts, and device performance (Invited)

Journal

ECS Transactions

Journal Volume

61

Journal Issue

2

Pages

113-124

Date Issued

2014

Author(s)

Chang, W.H.

Lin, T.D.

Liao, M.H.

Pi, T.W.

Kwo, J.

DOI

10.1149/06102.0113ecst

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443332

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84925141714&doi=10.1149%2f06102.0113ecst&partnerID=40&md5=9b245aa31c4870f37dc5553debcb6f0e

Type

conference paper