Structural and compositional investigation of yttrium-doped HfO2 films epitaxially grown on Si (111)
Journal
Applied Physics Letters
Journal Volume
91
Journal Issue
20
Date Issued
2007
Author(s)
Yang, Z.K.
Lee, W.C.
Lee, Y.J.
Chang, P.
Huang, M.L.
Yu, K.L.
Tang, M.-T.
Lin, B.-H.
Hsu, C.-H.
Kwo, J.
Type
journal article