Molecular beam epitaxy grown template for subsequent atomic layer deposition of high 庥 dielectrics

Journal

Applied Physics Letters

Journal Volume

89

Journal Issue

22

Date Issued

2006

Author(s)

Lee, K.Y.

Lee, W.C.

Lee, Y.J.

Huang, M.L.

Chang, C.H.

Wu, T.B.

Kwo, J.

DOI

10.1063/1.2397542

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443449

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33751565290&doi=10.1063%2f1.2397542&partnerID=40&md5=8653c42fde33151f4324bd4216007b87

Type

journal article