Advances in high 庥 gate dielectrics for Si and III-V semiconductors
Journal
Journal of Crystal Growth
Journal Volume
251
Pages
645-650
ISBN
10.1016/S0022-0248(02)02192-9
Date Issued
2003
Author(s)
Kwo, J.
Busch, B.
Muller, D.A.
Chabal, Y.J.
Kortan, A.R.
Mannaerts, J.P.
Yang, B.
Ye, P.
Gossmann, H.
Sergent, A.M.
Ng, K.K.
Bude, J.
Schulte, W.H.
Garfunkel, E.
Gustafsson, T.
Type
conference paper