High 庰 gate dielectrics Gd2O3and Y2O3for silicon
Journal
Applied Physics Letters
Journal Volume
77
Journal Issue
1
Pages
130-132
Date Issued
2000
Author(s)
Kwo, J.
Kortan, A.R.
Queeney, K.T.
Chabal, Y.J.
Mannaerts, J.P.
Boone, T.
Krajewski, J.J.
Sergent, A.M.
Rosamilia, J.M.
Type
journal article