Wet chemical and plasma etching of Ga2O3(Gd2O3)

Journal

Journal of the Electrochemical Society

Journal Volume

144

Journal Issue

9

Pages

L239-L241

Date Issued

1997

Author(s)

Ren, F.

Mannaerts, J.P.

Lothian, J.R.

Cho, A.Y.

DOI

10.1149/1.1837929

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/443493

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-0031233571&doi=10.1149%2f1.1837929&partnerID=40&md5=0b1067f0bf8e06df93ea8006ab7194b4

Type

journal article