Comparison of model and experiment for Ar, Ar/O2 and Ar/O 2/Cl2 inductively coupled plasmas

Journal

Journal of Physics D: Applied Physics

Journal Volume

39

Journal Issue

15

Pages

3272-3284

Date Issued

2006

Author(s)

Hsu, C.-C.

Nierode, M.A.

Coburn, J.W.

Graves, D.B.

JERRY CHENG-CHE HSU

DOI

10.1088/0022-3727/39/15/009

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/445422

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33746471207&doi=10.1088%2f0022-3727%2f39%2f15%2f009&partnerID=40&md5=7f3507c82077ebc22f51b1824cd1db1c

Type

journal article