https://scholars.lib.ntu.edu.tw/handle/123456789/445765| Title: | Bonding characterization and nano-indentation study of the amorphous SiCxNy films with and without hydrogen incorporation | Authors: | Lo, H. C. Wu, J. J. Wen, C. Y. Wong, T. S. Lin, S. T. Chen, K. H. Chen, L. C. SHIANG-TAI LIN |
Issue Date: | 2001 | Journal Volume: | 10 | Journal Issue: | 9-10 | Start page/Pages: | 1916-1920 | Source: | Diamond and Related Materials | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/445765 | ISSN: | 0925-9635 | DOI: | 10.1016/S0925-9635(01)00421-6 |
| Appears in Collections: | 化學工程學系 |
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