https://scholars.lib.ntu.edu.tw/handle/123456789/445767| Title: | Effect of carbon sources on silicon carbon nitride films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor | Authors: | Wu, J. J. Chen, K. H. Wen, C. Y. Chen, L. C. Guo, X. J. Lo, H. J. Lin, S. T. Yu, Y. C. Wang, C. W. Lin, E. K. SHIANG-TAI LIN |
Issue Date: | 2000 | Journal Volume: | 9 | Journal Issue: | 3-6 | Start page/Pages: | 556-561 | Source: | Diamond and Related Materials | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/445767 | ISSN: | 0925-9635 | DOI: | 10.1016/S0925-9635(99)00218-6 |
| Appears in Collections: | 化學工程學系 |
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