Effect of carbon sources on silicon carbon nitride films growth in an electron cyclotron resonance plasma chemical vapor deposition reactor
Journal
Diamond and Related Materials
Journal Volume
9
Journal Issue
3-6
Pages
556-561
Date Issued
2000
Author(s)
Wu, J. J.
Chen, K. H.
Wen, C. Y.
Chen, L. C.
Guo, X. J.
Lo, H. J.
Lin, S. T.
Yu, Y. C.
Wang, C. W.
Type
journal article