Highly transparent nano-crystalline diamond film's grown by microwave CVD
Journal
Solid State Communications
Journal Volume
107
Journal Issue
6
Pages
301-305
Date Issued
1998
Author(s)
Bhusari, D. M.
Yang, J. R.
Wang, T. Y.
Lin, S. T.
Chen, K. H.
Abstract
We report here the growth of highly transparent nano-crystalline diamond films on quartz substrates by microwave plasma enhanced CVD. Optical transmittance of greater than 73% beyond 700 nm has been obtained for films as thick as 1 μm, while for 0.6 μm thick films it is 80%. Such high optical transparency of these films is primarily attributed to the smoothness of their surface (average roughness of about 100-130 Å) as well as the high content of sp3 bonded carbon. A growth model for explaining the dependence of optical transparency on various deposition parameters is also proposed. © 1998 Elsevier Science Ltd. All rights reserved.
Type
journal article