https://scholars.lib.ntu.edu.tw/handle/123456789/447522| Title: | Spring constant calibration of microcantilever by astigmatic detection system | Authors: | Liao, H.-S. Juang, B.-J. Huang, K.-Y. Hwu, E.-T. Chang, C.-S. HSIEN-SHUN LIAO |
Issue Date: | 2012 | Journal Volume: | 51 | Journal Issue: | 8 PART 4 | Source: | Japanese Journal of Applied Physics | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/447522 | DOI: | 10.1143/JJAP.51.08KB13 |
| Appears in Collections: | 機械工程學系 |
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