Spring constant calibration of microcantilever by astigmatic detection system

Journal

Japanese Journal of Applied Physics

Journal Volume

51

Journal Issue

8 PART 4

Date Issued

2012

Author(s)

Liao, H.-S.

Juang, B.-J.

Huang, K.-Y.

Hwu, E.-T.

HSIEN-SHUN LIAO

KUANG-YUH HUANG

DOI

10.1143/JJAP.51.08KB13

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447522

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84865241468&doi=10.1143%2fJJAP.51.08KB13&partnerID=40&md5=e514b81cb2fd035c5ed1c5cd3c88b54a

Type

journal article