Optical imaging module for astigmatic detection system
Journal
Review of Scientific Instruments
Journal Volume
87
Journal Issue
5
Date Issued
2016
Author(s)
Wang, W.-M.
Cheng, C.-H.
Molnar, G.
Hwang, I.-S.
Huang, K.-Y.
Danzebrink, H.-U.
Hwu, E.-T.
Abstract
In this paper, an optical imaging module design for an astigmatic detection system (ADS) is presented. The module is based on a commercial optical pickup unit (OPU) and it contains a coaxial illuminant for illuminating a specimen. Furthermore, the imaging module facilitates viewing the specimen and the detection laser spot of the ADS with a lateral resolution of approximately 1 μm without requiring the removal of an element of the OPU. Two polarizers and one infrared filter are used to eliminate stray laser light in the OPU and stray light produced by the illuminant. Imaging modules designed for digital versatile disks (DVDs) and Blu-ray DVDs were demonstrated. Furthermore, the module can be used for imaging a small cantilever with approximate dimensions of 2 μm (width) × 5 μm (length), and therefore, it has the potential to be used in high-speed atomic force microscopy.
SDGs
Type
journal article