Effect of main gas and carrier gas on ZnO thin films deposited by atmospheric pressure plasma jet

Journal

Thin Solid Films

Journal Volume

594

Pages

282-286

Date Issued

2015

Author(s)

Chou, T.-S.

Chen, Y.-Y.

DOI

10.1016/j.tsf.2015.05.050

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447795

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84947485379&doi=10.1016%2fj.tsf.2015.05.050&partnerID=40&md5=dcc158a66c00cdb69b70cdbb024286cd

Type

conference paper