Accurate submicron edge detection using the phase change of a nano-scale shifting laser spot

Journal

Optics and Laser Technology

Journal Volume

92

Pages

109-119

Date Issued

2017

Author(s)

Hai, H.H.

Chen, L.-C.

Nguyen, D.T.

Lin, S.-T.

Yeh, S.L.

Yao, Y.

LIANG-CHIA CHEN

DOI

10.1016/j.optlastec.2017.01.006

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447820

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85010297074&doi=10.1016%2fj.optlastec.2017.01.006&partnerID=40&md5=7250d52fdc3d910001d7365c8a7a4f11

Type

journal article