3-D micro surface profilometry employing novel Mirau-based lateral scanning interferometry

Journal

Measurement Science and Technology

Journal Volume

25

Journal Issue

9

Date Issued

2014

Author(s)

Chen, L.-C.

Le, M.-T.

Lin, Y.-S.

LIANG-CHIA CHEN

DOI

10.1088/0957-0233/25/9/094004

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447836

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84906277003&doi=10.1088%2f0957-0233%2f25%2f9%2f094004&partnerID=40&md5=d1012e30d5b5cc3b931229ad5ec5401c

Type

journal article