3-D surface profilometry using simultaneous phase-shifting interferometry

Journal

Optics Communications

Journal Volume

283

Journal Issue

18

Pages

3376-3382

Date Issued

2010

Author(s)

Chen, L.-C.

Yeh, S.-L.

Tapilouw, A.M.

Chang, J.-C.

LIANG-CHIA CHEN

DOI

10.1016/j.optcom.2010.05.001

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447866

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-77953652232&doi=10.1016%2fj.optcom.2010.05.001&partnerID=40&md5=ab5e1cece2172fb19399b37210ede108

Type

journal article