3-D surface profilometry for both static and dynamic nano-scale full field characterization of AFM micro cantilever beams

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

5878

Pages

1-12

Date Issued

2005

Author(s)

Chen, L.-C.

Fan, K.-C.

Lin, C.-D.

Chang, C.C.

Kao, C.-F.

Chou, J.-T.

LIANG-CHIA CHEN

DOI

10.1117/12.614683

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/447891

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-29244433563&doi=10.1117%2f12.614683&partnerID=40&md5=36b76d707d8c912277e05caebfce3c2e

Type

conference paper