Fabrication of optical waveguide devices using electromagnetic assisted nanoimprinting
Journal
2009 International Conference on Signal Processing Systems
Pages
910-912
Date Issued
2009
Author(s)
Abstract
A creative technology was used in this research. Using the PDMS flexible mold magnetic powder method to transmit imprinting, and by combining the special characteristics of the soft lithography, polymethylmethacrylate (PMMA), and electromagnetic Plate uniform control pressing technology, researching the use of magnetic flexible mold imprinting technology to produce the optical waveguide devices, so as to allow the usage and the technology of micro hot embossing or nanoimprinting more mature.
SDGs
Type
conference paper