https://scholars.lib.ntu.edu.tw/handle/123456789/448191
標題: | A novel method for fabrication of plastic microlens array with aperture stops for projection photolithography | 作者: | Chang, C.-Y. SEN-YEU YANG Wu, M.-S. Jiang, L.-T. LON A. WANG |
關鍵字: | Aperture stop; Hot press; Microlens array; Microlens projection lithography; Shadow mask | 公開日期: | 2007 | 卷: | 46 | 期: | 5A | 起(迄)頁: | 2932-2935 | 來源出版物: | Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 摘要: | Microlens projection lithography is a new lithography method that uses a microlens array with aperture stops to image a single pattern on a mask onto a resist layer, forming an array of the miniaturized pattern. However, the fabrication of a microlens array with aperture stops is complicated, time-consuming and requires expensive facilities. In this paper, we report a single-step fabrication method of plastic microlens arrays with aperture stops. By using gas pressure to hot press a stainless-steel shadow mask with a microhole array onto a thermoplastic film, the softened polymer material is partially filled into the holes of the shadow mask, and forms a convex surface due to surface tension. After cooling, while keeping the microlens array and shadow mask attached, a plastic microlens array with aperture stops is obtained. To verify its capacity, a microlens projection lithography facility has been designed, constructed, and tested. Arrays of μm-sized patterns have been successfully fabricated using transparency masks of a mm-sized pattern. ©2007 The Japan Society of Applied Physics. |
URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448191 | ISSN: | 00214922 | DOI: | 10.1143/JJAP.46.2932 | SDG/關鍵字: | Image acquisition; Photolithography; Plastics; Polymers; Stainless steel; Surface tension; Thermoplastics; Aperture stops; Microlens projection lithography; Plastic microlens array; Shadow mask; Microlenses |
顯示於: | 機械工程學系 |
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