Development of fluid-based heating and pressing systems for micro hot embossing

Journal

Microsystem Technologies

Journal Volume

11

Journal Issue

6

Pages

396-403

Date Issued

2005

Author(s)

Chang, J.-H.

Yang, S.-Y.

DOI

10.1007/s00542-004-0481-5

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448198

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-18744368492&doi=10.1007%2fs00542-004-0481-5&partnerID=40&md5=f1de02eca82c8bf4cd5a045f8a5fc4e8

Type

journal article