Development of a 2x2 optical switch using bi-stable solenoid-based actuators
Journal
2010 International Conference on Optical MEMS and Nanophotonics, Optical MEMS and Nanophotonics
Pages
123-124
Date Issued
2010
Author(s)
Abstract
This paper presents the development of a 2×2 optical switch which consists of a MEMS-based silicon micro-mirror structure and two bi-stable solenoid-based actuators. The silicon micro-mirror structure is realized by using a proposed simple single-step anisotropic silicon etching process. Bi-stable solenoid-based actuators are designed and developed. The proposed device, which adapts the split-cross bar (SCB) design as the optical-path configuration, has many advantages such as low power consumption, easy fiber alignment, simple manufacturing process, and simple actuation scheme. The measured insertion loss of the device is about -0.9 ~ -1.1 dB. The long-term reliability test shows that the deviations of the insertion losses are less than 0.03 dB after 10,000 switching cycles. Also, the measured cross-talk is about -60 dB, and the measured switching time is less than 10 ms.
SDGs
Type
conference paper