https://scholars.lib.ntu.edu.tw/handle/123456789/448525
Title: | A linnik scanning white-light interferometry system using a MEMS digital-to-analog converter | Authors: | Liao, H.-H. Yang, Y.-J. YAO-JOE YANG |
Issue Date: | 2010 | Journal Volume: | 5 | Start page/Pages: | 758-761 | Source: | Procedia Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/448525 | DOI: | 10.1016/j.proeng.2010.09.219 |
Appears in Collections: | 機械工程學系 |
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