Ultrasonic vibration assisted mechanical chemical polishing (MCP) of silicon carbide

Journal

Advanced Materials Research

Journal Volume

565

Pages

255-260

Date Issued

2012

Author(s)

Liao, Y.S.

Yu, Y.P.

Huang, C.W.

YUNN-SHIUAN LIAO

DOI

10.4028/www.scientific.net/AMR.565.255

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448640

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84869388765&doi=10.4028%2fwww.scientific.net%2fAMR.565.255&partnerID=40&md5=2a957a4ec6b70675ddaf9076db10275f

Type

conference paper