Eight-phase-level diffractive microlens for beam splitting using LIGA-lIke Process

Journal

Japanese Journal of Applied Physics

Journal Volume

45

Journal Issue

4 A

Pages

2817-2823

Date Issued

2006

Author(s)

Yang, J.-J.

Liao, Y.-S.

Chen, C.-F.

YUNN-SHIUAN LIAO

DOI

10.1143/JJAP.45.2817

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448664

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-33645711641&doi=10.1143%2fJJAP.45.2817&partnerID=40&md5=4331efd98e65b96f708e45078de14dc6

Type

journal article