Computational study of variations in gap size for the electrostatic levitating force of MEMS device using dual BEM

Journal

Microelectronics Journal

Journal Volume

35

Journal Issue

9

Pages

739-748

Date Issued

2004

Author(s)

Chyuan, S.-W.

Liao, Y.-S.

Chen, J.-T.

YUNN-SHIUAN LIAO

DOI

10.1016/j.mejo.2004.06.005

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/448672

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-3943066338&doi=10.1016%2fj.mejo.2004.06.005&partnerID=40&md5=fbb952e97379afae953c5dd10f0a7033

Type

journal article