Removal of fine particles from IC chip carbonization process in a rotating packed bed: Modeling and assessment
Journal
Chemosphere
Journal Volume
238
Date Issued
2020
Author(s)
Abstract
A high-gravity rotating packed bed (HiGee RPB) is very efficient at removing pollution because it exerts a strong high centrifugal and allows tiny droplets to form, which allows the control of gaseous and particulate air pollution. In this study, fine particles that are removed from integrated circuit (IC) chip carbonization process using a RPB are evaluated under different high gravity factors and liquid-to-gas ratios. The greatest number of particles captured per energy consumption is 17.77 mg kWh−1 in a RPB. This allow greater energy efficiency for the HiGee technology prevents an air-energy nexus. The maximum available particle removal efficiency for a RPB is determined using a response surface model (RSM). 99.5% of particles are removed at a high gravity factor of 262 and a liquid-to-gas ratio of 0.24. A semi-theoretical model is developed to determine the particle removal efficiency individually in packing and cavity zones of the RPB. More particles are removed in a cavity zone than in the packing zone as the high gravity factor increases. An empirical model shows that the particle removal efficiency depends on the operating factors. Finally, a comparison analysis of particulate matter treatment in various types of RPB is used to validate the performance in terms of particle removal using high-gravity technology for different industries. © 2019
Other Subjects
Carbonization; Energy efficiency; Energy utilization; Gravitation; Integrated circuits; Packed beds; Particles (particulate matter); Surface properties; Timing circuits; Fine particles; IC chips; Response surface methodology; Rotating packed bed; Theoretical modeling; Air pollution control; atmospheric pollution; energy efficiency; gravity; packing; particulate matter; pollutant removal; response surface methodology; theoretical study; Article; carbonization; gravity; particulate matter; response surface method; theoretical model; water vapor; centrifugation; ecosystem restoration; gas; particle size; pollution; procedures; carbon; Carbon; Centrifugation; Environmental Pollution; Environmental Restoration and Remediation; Gases; Particle Size; Particulate Matter
Type
journal article