Direct-scatterometry-enabled PEC model calibration with two-dimensional layouts

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

9050

Date Issued

2014

Author(s)

Yang, Y.-Y.

Lee, H.-P.

Liu, C.-H.

Yu, H.-Y.

Tsai, K.-Y.

DOI

10.1117/12.2048683

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451451

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84902097235&doi=10.1117%2f12.2048683&partnerID=40&md5=fde0900728d499f547a878b0c461fc68

Type

conference paper