Direct-scatterometry-enabled optical-proximity-correction-model calibration

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

8681

Date Issued

2013

Author(s)

Chen, C.-Y.

Ng, P.C.W.

Liu, C.-H.

Shen, Y.-T.

Tsai, K.-Y.

Li, J.-H.

Shieh, J.J.

DOI

10.1117/12.2009064

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451458

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84878593681&doi=10.1117%2f12.2009064&partnerID=40&md5=e93288b1362ef6177c4f05bccb163f31

Type

conference paper