https://scholars.lib.ntu.edu.tw/handle/123456789/451458
Title: | Direct-scatterometry-enabled optical-proximity-correction-model calibration | Authors: | Chen, C.-Y. Ng, P.C.W. Liu, C.-H. Shen, Y.-T. Tsai, K.-Y. Li, J.-H. Shieh, J.J. KUEN-YU TSAI JIA-HAN LI |
Issue Date: | 2013 | Journal Volume: | 8681 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/451458 | DOI: | 10.1117/12.2009064 |
Appears in Collections: | 工程科學及海洋工程學系 |
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