Direct-scatterometry-enabled lithography model calibration

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

8324

Date Issued

2012

Author(s)

Chen, C.-Y.

Tsai, K.-Y.

Shen, Y.-T.

Lee, Y.-M.

Li, J.-H.

Shieh, J.J.

DOI

10.1117/12.917516

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451467

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84861060205&doi=10.1117%2f12.917516&partnerID=40&md5=dad3bb1298a80a2e4d804b3480fabe09

Type

conference paper