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College of Engineering / 工學院
Engineering Science and Ocean Engineering / 工程科學及海洋工程學系
Direct-scatterometry-enabled lithography model calibration
Details
Direct-scatterometry-enabled lithography model calibration
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
8324
Date Issued
2012
Author(s)
Chen, C.-Y.
Tsai, K.-Y.
Shen, Y.-T.
Lee, Y.-M.
Li, J.-H.
Shieh, J.J.
KUEN-YU TSAI
JIA-HAN LI
DOI
10.1117/12.917516
URI
https://scholars.lib.ntu.edu.tw/handle/123456789/451467
URL
https://www.scopus.com/inward/record.uri?eid=2-s2.0-84861060205&doi=10.1117%2f12.917516&partnerID=40&md5=dad3bb1298a80a2e4d804b3480fabe09
Type
conference paper