https://scholars.lib.ntu.edu.tw/handle/123456789/451467| Title: | Direct-scatterometry-enabled lithography model calibration | Authors: | Chen, C.-Y. Tsai, K.-Y. Shen, Y.-T. Lee, Y.-M. Li, J.-H. Shieh, J.J. Chen, A.C. JIA-HAN LI |
Issue Date: | 2012 | Journal Volume: | 8324 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/451467 | DOI: | 10.1117/12.917516 |
| Appears in Collections: | 工程科學及海洋工程學系 |
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