Efficient scattering simulations for equivalent extreme ultraviolet mask multilayer structures by modified transmission line theory and finite-difference time-domain method

Journal

Journal of Micro/Nanolithography, MEMS, and MOEMS

Journal Volume

9

Journal Issue

4

Date Issued

2010

Author(s)

Lee, Y.-M.

Li, J.-H.

Ng, P.C.W.

Pei, T.-H.

Wang, F.-M.

Tsai, K.-Y.

DOI

10.1117/1.3503532

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451478

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-80455129595&doi=10.1117%2f1.3503532&partnerID=40&md5=d2bb54cb311a5f6cfcd4919111d86eec

Type

journal article