Synchrotron radiation X-ray absorption and optical studies of cubic SiC films grown on Si by chemical vapor deposition

Journal

Advanced Materials Research

Journal Volume

306-307

Pages

167-170

Date Issued

2011

Author(s)

Tu, Y.-L.

Huang, Y.-H.

Kong, L.

Lee, K.-Y.

Jang, L.-Y.

Tin, C.-C.

Liu, C.-W.

DOI

10.4028/www.scientific.net/AMR.306-307.167

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451527

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-80053086066&doi=10.4028%2fwww.scientific.net%2fAMR.306-307.167&partnerID=40&md5=ca1a0add7cfcaabd751a392e21a07240

Type

conference paper