Decomposition Modeling of Carbon Tetrafluoride with Nitrogen Thermal Plasma

Journal

IEEE Transactions on Plasma Science

Journal Volume

47

Journal Issue

2

Pages

1185-1195

Date Issued

2019

Author(s)

Chau, S.-W.

Lin, Y.-T.

Chen, S.-H.

DOI

10.1109/TPS.2018.2855680

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451595

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85051374288&doi=10.1109%2fTPS.2018.2855680&partnerID=40&md5=c03c374ca48e8044e453b09d8b7536a0

Type

journal article