https://scholars.lib.ntu.edu.tw/handle/123456789/451905
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Chang, C.-M. | en_US |
dc.contributor.author | Chiang, D. | en_US |
dc.contributor.author | Shiao, M.-H. | en_US |
dc.contributor.author | Yang, C.-T. | en_US |
dc.contributor.author | Huang, M.-J. | en_US |
dc.contributor.author | Cheng, C.-T. | en_US |
dc.contributor.author | WEN-JENG HSUEH | en_US |
dc.creator | WEN-JENG HSUEH;Hsueh, W.-J.;Cheng, C.-T.;Huang, M.-J.;Yang, C.-T.;Shiao, M.-H.;Chiang, D.;Chang, C.-M. | - |
dc.date.accessioned | 2020-01-17T07:48:17Z | - |
dc.date.available | 2020-01-17T07:48:17Z | - |
dc.date.issued | 2013 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/451905 | - |
dc.relation.ispartof | Microsystem Technologies | - |
dc.title | Dual layer photoresist complimentary lithography applied on sapphire substrate for producing submicron patterns | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.1007/s00542-013-1881-1 | - |
dc.identifier.scopus | 2-s2.0-84887235947 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84887235947&doi=10.1007%2fs00542-013-1881-1&partnerID=40&md5=d1dc47204f251dcdf69f979cf2dbc5b4 | - |
dc.relation.pages | 1745-1751 | - |
dc.relation.journalvolume | 19 | - |
dc.relation.journalissue | 11 | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
crisitem.author.dept | Engineering Science and Ocean Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
Appears in Collections: | 工程科學及海洋工程學系 |
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