https://scholars.lib.ntu.edu.tw/handle/123456789/451911| Title: | Submicron patterns on sapphire substrate produced by dual layer photoresist complimentary lithography | Authors: | Chang, C.-M. Shiao, M.-H. Chiang, D. Yang, C.-T. Huang, M.-J. Cheng, C.-T. Hsueh, W.-J. WEN-JENG HSUEH |
Issue Date: | 2013 | Journal Volume: | 284-287 | Start page/Pages: | 334-341 | Source: | Applied Mechanics and Materials | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/451911 | DOI: | 10.4028/www.scientific.net/AMM.284-287.334 |
| Appears in Collections: | 工程科學及海洋工程學系 |
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