https://scholars.lib.ntu.edu.tw/handle/123456789/451911
DC 欄位 | 值 | 語言 |
---|---|---|
dc.contributor.author | Chang, C.-M. | en_US |
dc.contributor.author | Shiao, M.-H. | en_US |
dc.contributor.author | Chiang, D. | en_US |
dc.contributor.author | Yang, C.-T. | en_US |
dc.contributor.author | Huang, M.-J. | en_US |
dc.contributor.author | Cheng, C.-T. | en_US |
dc.contributor.author | Hsueh, W.-J. | en_US |
dc.contributor.author | WEN-JENG HSUEH | en_US |
dc.creator | WEN-JENG HSUEH;Hsueh, W.-J.;Cheng, C.-T.;Huang, M.-J.;Yang, C.-T.;Chiang, D.;Shiao, M.-H.;Chang, C.-M. | - |
dc.date.accessioned | 2020-01-17T07:48:18Z | - |
dc.date.available | 2020-01-17T07:48:18Z | - |
dc.date.issued | 2013 | - |
dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/451911 | - |
dc.relation.ispartof | Applied Mechanics and Materials | - |
dc.title | Submicron patterns on sapphire substrate produced by dual layer photoresist complimentary lithography | en_US |
dc.type | conference paper | en |
dc.identifier.doi | 10.4028/www.scientific.net/AMM.284-287.334 | - |
dc.identifier.scopus | 2-s2.0-84873904125 | - |
dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-84873904125&doi=10.4028%2fwww.scientific.net%2fAMM.284-287.334&partnerID=40&md5=816a065173eb7f8c4b906ab79878f3c7 | - |
dc.relation.pages | 334-341 | - |
dc.relation.journalvolume | 284-287 | - |
item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
item.openairetype | conference paper | - |
item.grantfulltext | none | - |
item.cerifentitytype | Publications | - |
item.fulltext | no fulltext | - |
crisitem.author.dept | Engineering Science and Ocean Engineering | - |
crisitem.author.parentorg | College of Engineering | - |
顯示於: | 工程科學及海洋工程學系 |
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