https://scholars.lib.ntu.edu.tw/handle/123456789/451950| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Gong, X. | en_US |
| dc.contributor.author | Chen, C.-T. | en_US |
| dc.contributor.author | Wu, W.-J. | en_US |
| dc.contributor.author | Liao, W.-H. | en_US |
| dc.contributor.author | WEN-JONG WU | zz |
| dc.creator | WEN-JONG WU;Liao, W.-H.;Wu, W.-J.;Chen, C.-T.;Gong, X. | - |
| dc.date.accessioned | 2020-01-17T07:48:25Z | - |
| dc.date.available | 2020-01-17T07:48:25Z | - |
| dc.date.issued | 2019 | - |
| dc.identifier.uri | https://scholars.lib.ntu.edu.tw/handle/123456789/451950 | - |
| dc.relation.ispartof | Proceedings of SPIE - The International Society for Optical Engineering | - |
| dc.title | A high sensitivity piezoelectric MEMS accelerometer based on aerosol deposition method | en_US |
| dc.type | conference paper | - |
| dc.identifier.doi | 10.1117/12.2514224 | - |
| dc.identifier.scopus | 2-s2.0-85068327310 | - |
| dc.identifier.url | https://www.scopus.com/inward/record.uri?eid=2-s2.0-85068327310&doi=10.1117%2f12.2514224&partnerID=40&md5=abbd6ef0f85fd2d4d87df2fddcfc3332 | - |
| dc.relation.journalvolume | 10970 | - |
| item.openairetype | conference paper | - |
| item.openairecristype | http://purl.org/coar/resource_type/c_5794 | - |
| item.fulltext | no fulltext | - |
| item.cerifentitytype | Publications | - |
| item.grantfulltext | none | - |
| crisitem.author.dept | Engineering Science and Ocean Engineering | - |
| crisitem.author.orcid | 0000-0003-0223-249X | - |
| crisitem.author.parentorg | College of Engineering | - |
| Appears in Collections: | 工程科學及海洋工程學系 | |
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