A high sensitivity piezoelectric MEMS accelerometer based on aerosol deposition method

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

10970

Date Issued

2019

Author(s)

Gong, X.

Chen, C.-T.

Wu, W.-J.

Liao, W.-H.

DOI

10.1117/12.2514224

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451950

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85068327310&doi=10.1117%2f12.2514224&partnerID=40&md5=abbd6ef0f85fd2d4d87df2fddcfc3332

Type

conference paper