Development of an aerosol PZT actuator for a scanner system

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

10170

Date Issued

2017

Author(s)

Chen, P.-J.

Lin, T.-K.

Wu, W.-J.

Schipf, D.

Wang, W.-C.

DOI

10.1117/12.2259969

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451964

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-85020499129&doi=10.1117%2f12.2259969&partnerID=40&md5=a7db83847240c395ee2e4b4c8f46b0e2

SDGs

[SDGs]SDG3

[SDGs]SDG7

Type

conference paper