Aerosol deposited PZT actuated 2D scanner system
Journal
Proceedings of SPIE - The International Society for Optical Engineering
Journal Volume
9431
Date Issued
2015
Author(s)
Abstract
A new lead-zirconium-titanate (PZT) actuator design for a micro scanning illuminating device is being developed. The thin PZT film is deposited directly on stainless steel by using an aerosol deposition machine. The aerosol deposition method enables inexpensive, quick, room temperature fabrication while producing high quality PZT films. The presented scanners would be attractive for endoscopic device applications, where inexpensive systems with high resolution would be a move toward disposal endoscopes. The design of this scanning illuminator and fabrication method are presented. Measurements of the PZT layer surface roughness and the aerosol deposited PZT powder particle diameter are presented. Ongoing work and fabrication challenges are discussed.
Type
conference paper