Aerosol deposited PZT actuated 2D scanner system

Journal

Proceedings of SPIE - The International Society for Optical Engineering

Journal Volume

9431

Date Issued

2015

Author(s)

Schipf, D.R.

Chen, C.-T.

Kuo, C.-L.

Chu, K.-Y.

Wu, W.-J.

Wang, W.-C.

DOI

10.1117/12.2186333

URI

https://scholars.lib.ntu.edu.tw/handle/123456789/451976

URL

https://www.scopus.com/inward/record.uri?eid=2-s2.0-84948844015&doi=10.1117%2f12.2186333&partnerID=40&md5=259e8ec413e2638300892d53e36db074

Type

conference paper