https://scholars.lib.ntu.edu.tw/handle/123456789/451976| Title: | Aerosol deposited PZT actuated 2D scanner system | Authors: | Schipf, D.R. Chen, C.-T. Kuo, C.-L. Chu, K.-Y. Wu, W.-J. Wang, W.-C. WEN-JONG WU |
Issue Date: | 2015 | Journal Volume: | 9431 | Source: | Proceedings of SPIE - The International Society for Optical Engineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/451976 | DOI: | 10.1117/12.2186333 |
| Appears in Collections: | 工程科學及海洋工程學系 |
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