https://scholars.lib.ntu.edu.tw/handle/123456789/451985| Title: | Fabrication of PZT MEMS energy harvester based on silicon and stainless-steel substrates utilizing an aerosol deposition method | Authors: | Lin, S.-C. Wu, W.-J. WEN-JONG WU |
Issue Date: | 2013 | Journal Volume: | 23 | Journal Issue: | 12 | Source: | Journal of Micromechanics and Microengineering | URI: | https://scholars.lib.ntu.edu.tw/handle/123456789/451985 | DOI: | 10.1088/0960-1317/23/12/125028 |
| Appears in Collections: | 工程科學及海洋工程學系 |
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